Introduction to vacuum technology
Geneseo, New York : Milne Open Textbooks, 2023
Online
E-Book
- 1 online resource : color illustrations.
"This book approaches vacuum systems from a pressure regime viewpoint, covering basic vacuum science, followed by the rough vacuum regime, including gas load, pumping mechanisms, pressure measurement, vacuum system construction, and basic troubleshooting concepts. The study of high vacuum systems follows and the same topics are revisited, and finally the topics of leak detection and residual gas analysis are discussed."--Publisher.
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Introduction to vacuum technology
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Autor/in / Beteiligte Person: | Hata, David M.hor ; Brewer, Elena Vhor ; Louwagie, Nancy Jhor |
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Veröffentlichung: | Geneseo, New York : Milne Open Textbooks, 2023 |
Medientyp: | E-Book |
Umfang: | 1 online resource : color illustrations. |
ISBN: | 978-1-942341-96-3 (print) ; 978-1-942341-97-0 (print) ; 1-942341-96-2 (print) ; 1-942341-97-0 (print) |
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